Toledano Luque, MariaMariaToledano LuqueDegraeve, RobinRobinDegraeveRoussel, PhilippePhilippeRousselLuong, VuVuLuongTang, BaojunBaojunTangLisoni, JuditJuditLisoniTan, Chi LimChi LimTanArreghini, AntonioAntonioArreghiniVan den Bosch, GeertGeertVan den BoschGroeseneken, GuidoGuidoGroesenekenVan Houdt, JanJanVan Houdt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23173Statistical spectroscopy of switching traps in deeply scaled vertical poly-Si channel for 3D memoriesProceedings paper