Correlated Intrinsic Electrical and Chemical Properties of Epitaxial WS2 via Combined C-AFM and ToF-SIMS Characterization

Spampinato, ValentinaValentinaSpampinatoShi, YuanyuanYuanyuanShiSerron, JillJillSerronMinj, AlbertAlbertMinjGroven, BenjaminBenjaminGrovenHantschel, ThomasThomasHantschelvan der Heide, PaulPaulvan der HeideFranquet, AlexisAlexisFranquet2023-06-082023-01-152023-01-172023-06-0820232196-7350WOS:000906524500001https://imec-publications.be/handle/20.500.12860/40983Correlated Intrinsic Electrical and Chemical Properties of Epitaxial WS2 via Combined C-AFM and ToF-SIMS CharacterizationJournal article10.1002/admi.202202016WOS:0009065245000012-DIMENSIONAL MATERIALSMETALTRANSISTORSMONOLAYERSRESOLUTIONGRAPHENEOXYGEN