Corrosion of the copper damascene interconnects as a function of the electrochemical plating process parameters

Ernur, DidemDidemErnurWu, WenWenWuBrongersma, SywertSywertBrongersmaTerzieva, ValentinaValentinaTerzievaMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8891Corrosion of the copper damascene interconnects as a function of the electrochemical plating process parametersProceedings paper