Tokei, ZsoltZsoltTokeiCroes, KristofKristofCroesDemuynck, StevenStevenDemuynckKauerauf, ThomasThomasKaueraufBeyer, GeraldGeraldBeyer2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18091Recent advances in copper based interconnect reliabilityMeeting abstract