Diamond tips and cantilevers for the characterization of semiconductor devices

Malavé, A.A.MalavéOesterschulze, E.E.OesterschulzeKulisch, W.W.KulischTrenkler, ThomasThomasTrenklerHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3649Diamond tips and cantilevers for the characterization of semiconductor devicesJournal article