De Simone, DaniloDaniloDe SimoneLyons, AdamAdamLyonsRio, DavidDavidRioLee, SookSookLeeDelorme, MaxenceMaxenceDelormeFumar-Pici, AnitaAnitaFumar-PiciKocsis, MichaelMichaelKocsisDe Schepper, PeterPeterDe SchepperGreer, MichaelMichaelGreerWallow, THomasTHomasWallowStowers, Jason KJason KStowersGillijns, WernerWernerGillijnsBekaert, JoostJoostBekaert2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28157Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layerProceedings paper10.1117/12.2260441