Atmospheric and low pressure metalorganic vapor phase epitaxial growth of vertical quantum wells and well wires on submicron gratings

Vermeire, GerritGerritVermeireMoerman, IngridIngridMoermanYu, Zong-QiangZong-QiangYuVermaerke, FrankFrankVermaerkeVan Daele, PeterPeterVan DaeleDemeester, PietPietDemeester2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/445Atmospheric and low pressure metalorganic vapor phase epitaxial growth of vertical quantum wells and well wires on submicron gratingsJournal article