Aarts, ArnoArnoAartsPereira Neves, HerculesHerculesPereira NevesPuers, BobBobPuersVan Hoof, ChrisChrisVan Hoof2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13272Interconnect for out-of-plane MEMS assemblyProceedings paper