Degraeve, RobinRobinDegraeveSchmitz, JurrianJurrianSchmitzPantisano, LuigiLuigiPantisanoSimoen, EddyEddySimoenHoussa, MichelMichelHoussaKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12023Electrical characterization of advanced gate dielectricsBook chapter