Claes, DieterDieterClaesFranco, JacopoJacopoFrancoCollaert, NadineNadineCollaertLinten, DimitriDimitriLintenHeyns, MarcMarcHeyns2021-10-252021-10-252018-12https://imec-publications.be/handle/20.500.12860/30435GdAlO3: a promising high-k dielectric for reliable gate stacks at low thermal budgetMeeting abstracthttp://www.ieeesisc.org/programs/2018_SISC_technical_preliminary-program.pdf