Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN

Morris, RichardRichardMorrisCuduvally, RamyaRamyaCuduvallyLin, Jhao-RongJhao-RongLinZhao, MingMingZhaoVandervorst, WilfriedWilfriedVandervorstThuvander, MattiasMattiasThuvanderFleischmann, ClaudiaClaudiaFleischmann2023-04-062022-09-042023-04-062022-110304-3991WOS:000844973000001https://imec-publications.be/handle/20.500.12860/40337Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlNJournal article10.1016/j.ultramic.2022.113592WOS:000844973000001ATOM-PROBE TOMOGRAPHYEVAPORATIONEVENTSDETECTORBORONMEDLINE:35988476