Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture

Yamagishi, HajimeHajimeYamagishiTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerDonaton, R. A.R. A.DonatonBender, HugoHugoBenderNogami, T.T.NogamiMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4955Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architectureOral presentation