Three-dimensional carrier profiling of InP-based devices using scanning spreading resistance microscopy

Xu, MingweiMingweiXuHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7070Three-dimensional carrier profiling of InP-based devices using scanning spreading resistance microscopyJournal article