Melvin, LawrenceLawrenceMelvinWard, BrianBrianWardSong, H.H.SongRhie, S.U.S.U.RhieLucas, K.D.K.D.LucasWiaux, VincentVincentWiauxVerhaegen, StafStafVerhaegenMaenhoudt, MireilleMireilleMaenhoudt2021-10-172021-10-1720081071-1023https://imec-publications.be/handle/20.500.12860/14146Exploration of etch step interactions in the dual patterning process for process modelingJournal article