High-k gate stack engineering – towards meeting low standby power and high performance targets

De Gendt, StefanStefanDe GendtBrunco, DavidDavidBruncoCaymax, MattyMattyCaymaxConard, ThierryThierryConardDate, LucienLucienDateDelabie, AnneliesAnneliesDelabieDeweerd, WimWimDeweerdGroeseneken, GuidoGuidoGroesenekenHoussa, MichelMichelHoussaHyun, SangjinSangjinHyunKaushik, VidyaVidyaKaushikKubicek, StefanStefanKubicekMaes, JanJanMaesPantisano, LuigiLuigiPantisanoRagnarsson, Lars-AkeLars-AkeRagnarssonRohr, ErikaErikaRohrSchram, TomTomSchramShimamoto, Y.Y.ShimamotoSleeckx, ErikErikSleeckxVandervorst, WilfriedWilfriedVandervorstVan Elshocht, SvenSvenVan ElshochtYamada, NaokiNaokiYamadaWitters, ThomasThomasWittersZhao, ChaoChaoZhaoZimmerman, PaulPaulZimmermanHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10293High-k gate stack engineering – towards meeting low standby power and high performance targetsProceedings paper