Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates

Soethoudt, JobJobSoethoudtGrillo, FabioFabioGrilloMarques, EstebanEstebanMarquesVan Ommen, RuudRuudVan OmmenTomczak, YoannYoannTomczakNyns, LauraLauraNynsVan Elshocht, SvenSvenVan ElshochtDelabie, AnneliesAnneliesDelabie2021-10-262021-10-2620182196-7350https://imec-publications.be/handle/20.500.12860/31829Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substratesJournal articlehttps://onlinelibrary.wiley.com/doi/abs/10.1002/admi.201800870