Pikulev, V.V.PikulevDictus, DriesDriesDictusLoginova, S.S.LoginovaBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-1820091862-5282https://imec-publications.be/handle/20.500.12860/16025New properties of halogen plasma-treated Cu filmsJournal article