Kraus, PhilipPhilipKrausChua, Tai ChenTai ChenChuaRothschild, AudeAudeRothschildCubaynes, FlorenceFlorenceCubaynesVeloso, AnabelaAnabelaVelosoMertens, SofieSofieMertensDate, LucienLucienDateBauer, ThomasThomasBauerAhmed, KhaledKhaledAhmedNouri, FaranFaranNouriSchreutelkamp, RobRobSchreutelkampSchaekers, MarcMarcSchaekers2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9150Further optimization of plasma nitridation of ultra-thin oxides for 65 nm node MOSFETSProceedings paper