Urbanowicz, AdamAdamUrbanowiczShamiryan, DenisDenisShamiryanBaklanov, MikhaïlMikhaïlBaklanovDe Gendt, StefanStefanDe Gendt2021-10-172021-10-1720080167-9317https://imec-publications.be/handle/20.500.12860/14589Oxygen chemiluminescence in He plasma as a method for plasma damage evaluation of Low-k dielectricsJournal article