Alternative oxide technologies benchmarked with PECVD oxide as rear dielectric for i-PERC cell architecture

Kuzma Filipek, IzabelaIzabelaKuzma FilipekDescamps, PierrePierreDescampsAsad, SaidSaidAsadBeaucarne, GuyGuyBeaucarneKaiser, VincentVincentKaiserCampeol, FrederickFrederickCampeolGrillo, GuiseppeGuiseppeGrilloDuerinckx, FilipFilipDuerinckxUruena De Castro, AngelAngelUruena De CastroSzlufcik, JozefJozefSzlufcik2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22629Alternative oxide technologies benchmarked with PECVD oxide as rear dielectric for i-PERC cell architectureProceedings paper