Materials characterization and device analysis for evaluation of semiconductor processes by highly-sophisticated photoelastic stress measurement technique

Herms, MartinMartinHermsWagner, MatthiasMatthiasWagnerMolchanov, AlexanderAlexanderMolchanovLin, PinyenPinyenLinDe Wolf, IngridIngridDe WolfZhao, MingMingZhao2021-10-222021-10-2220151610-1634https://imec-publications.be/handle/20.500.12860/25378Materials characterization and device analysis for evaluation of semiconductor processes by highly-sophisticated photoelastic stress measurement techniqueJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201400356/abstract