Uedono, A.A.UedonoKirimura, T.T.KirimuraWilson, ChrisChrisWilsonCroes, KristofKristofCroesDemuynck, StevenStevenDemuynckTokei, ZsoltZsoltTokeiOshima, N.N.OshimaSuzuki, R.R.Suzuki2021-10-212021-10-2120130021-8979https://imec-publications.be/handle/20.500.12860/23201Vacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beamsJournal article