Particle-induced X-ray emission in the analysis of GeCu thin films and photoresists containing As impurities

Kayhko, MarkoMarkoKayhkoMeersschaut, JohanJohanMeersschautSajavaara, TimoTimoSajavaara2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24040Particle-induced X-ray emission in the analysis of GeCu thin films and photoresists containing As impuritiesMeeting abstracthttp://webhotel2.tut.fi/fys/physicsdays/program/