Chiarella, ThomasThomasChiarellaRosmeulen, MaartenMaartenRosmeulenTigelaar, HowardHowardTigelaarKerner, ChristophChristophKernerNackaerts, AxelAxelNackaertsRamos, JavierJavierRamosLauwers, AnneAnneLauwersVeloso, AnabelaAnabelaVelosoJurczak, GosiaGosiaJurczakRothschild, AudeAudeRothschildWitters, LiesbethLiesbethWittersYu, HongYuHongYuYuKittl, JorgeJorgeKittlVerbeeck, RitaRitaVerbeeckde Potter de ten Broeck, MurielMurielde Potter de ten BroeckDebusschere, IngridIngridDebusschereAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-162021-10-162007-03https://imec-publications.be/handle/20.500.12860/11858FUSI specific yield monitoring enabling improved circuit performance and fast feedback to productionProceedings paper