Helin, PhilippePhilippeHelinCzarnecki, PiotrPiotrCzarneckiVerbist, AgnesAgnesVerbistBryce, GeorgeGeorgeBryceRottenberg, XavierXavierRottenbergSeveri, SimoneSimoneSeveri2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20794Poly-SiGe-based CMUT array with high acoustical pressureProceedings paper