Lee, Jae UkJae UkLeeOak, ApoorvaApoorvaOakKim, Ryan Ryoung HanRyan Ryoung HanKimDavid, AbercrombieAbercrombieDavidRehab, Kotb AliKotb AliRehabAhmed, Hamed-FatehyHamed-FatehyAhmed2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33388Multi-Patterning Options for 5nm and Below_SADP, SAQP, SALELEJournal articlehttps://go.mentor.com/55TT4