Margetis, JoeJoeMargetisMosleh, AboozarAboozarMoslehGhetmiri, Seyed AmirSeyed AmirGhetmiriBhargava, NupurNupurBhargavaYu, Shui-QingShui-QingYuProfijt, HaraldHaraldProfijtKohen, DavidDavidKohenLoo, RogerRogerLooVohra, AnuragAnuragVohraTolle, JohnJohnTolle2021-10-232021-10-232016-05https://imec-publications.be/handle/20.500.12860/26959Ge1-xSnx and SiyGe1-x-ySnx epitaxy on a commercial CVD reactorMeeting abstract