Celano, UmbertoUmbertoCelanoFavia, PaolaPaolaFaviaDrijbooms, ChrisChrisDrijboomsDixon-Luinenburg, OberonOberonDixon-LuinenburgRichard, OlivierOlivierRichardBender, HugoHugoBenderVancoille, EricEricVancoilleParedis, KristofKristofParedisLoo, RogerRogerLooSchulze, AndreasAndreasSchulzeHikavyy, AndriyAndriyHikavyyWitters, LiesbethLiesbethWittersMitard, JeromeJeromeMitardCollaert, NadineNadineCollaertHoriguchi, NaotoNaotoHoriguchiVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27987Individual device analysis using hybrid TEM-scalpel SSRM metrologyProceedings paper