Gao, WeiminWeiminGaoCiofi, IvanIvanCiofiSaad, YvesYvesSaadMatagne, PhilippePhilippeMatagneBachman, MichaelMichaelBachmanOulmane, MohamedMohamedOulmaneGillijns, WernerWernerGillijnsLucas, KevinKevinLucasDemmerle, WolfgangWolfgangDemmerleSchmoeller, ThomasThomasSchmoeller2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25285Patterning process exploration of metal 1 layer in 7nm node with 3D pattering flow simulationsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210053