Chew, Soon AikSoon AikChewHung, JoeyJoeyHungTurovets, IgorIgorTurovetsSaib, MohamedMohamedSaibGer, AvronAvronGerMoussa, AlainAlainMoussaZhang, BoyaoBoyaoZhangDe Vos, JoeriJoeriDe VosMiller, AndyAndyMillerCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayBeyne, EricEricBeyne2025-04-162025-02-152025-04-162024979-8-3503-9037-72687-9700WOS:001340802800075https://imec-publications.be/handle/20.500.12860/45210Scatterometry Application on Cu/SiCN surface topography towards high volume manufacturingProceedings paper10.1109/ESTC60143.2024.10712071979-8-3503-9036-0WOS:001340802800075