CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording

Seidl, KarstenKarstenSeidlHerwik, StanislavStanislavHerwikTorfs, TomTomTorfsPereira Neves, HerculesHerculesPereira NevesPaul, OliverOliverPaulRuther, PatrickPatrickRuther2021-10-192021-10-1920111057-7157https://imec-publications.be/handle/20.500.12860/19755CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recordingJournal article