Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording

Herwik, S.S.HerwikKisban, S.S.KisbanAarts, ArnoArnoAartsSeidl, K.K.SeidlGirardeau, G.G.GirardeauBenchenane, K.K.BenchenaneZugaro, M.B.M.B.ZugaroWiener, S.I.S.I.WienerPaul, O.O.PaulPereira Neves, HerculesHerculesPereira NevesRuther, P.P.Ruther2021-10-172021-10-1720090960-1317https://imec-publications.be/handle/20.500.12860/15467Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recordingJournal article