De Bisschop, PeterPeterDe BisschopKocsis, MichaelMichaelKocsisBruls, R.R.BrulsGrenville, A.A.GrenvilleVan Peski, C.C.Van Peski2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8750Initial assessment of the lithographic impact of the use of hard pellicles : an overviewProceedings paper