Adelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciGroven, BenjaminBenjaminGrovenMoens, KristofKristofMoensMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetSwerts, JohanJohanSwertsDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan Elshocht2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23468Atomic layer deposition of Ru thin films using the zero-valence precursor EBECH RuOral presentation