Precursor Design for Aerosol-Assisted Plasma Deposition of Poly(Ethylene Oxide)-Like Thin Films: Deposition Mechanism and Film Properties

Dekoster, TijsTijsDekosterVos, RitaRitaVosJans, KarolienKarolienJansVan Roy, WillemWillemVan RoyNisol, BernardBernardNisolDelabie, AnneliesAnneliesDelabie2025-05-112025-05-112025-MAY 41612-8850WOS:001480801600001https://imec-publications.be/handle/20.500.12860/45623Precursor Design for Aerosol-Assisted Plasma Deposition of Poly(Ethylene Oxide)-Like Thin Films: Deposition Mechanism and Film PropertiesJournal article10.1002/ppap.70032WOS:001480801600001PEO-LIKE COATINGSMONOLAYERPROTEINPOLYMERIZATIONEVAPORATIONSTABILITYSURFACESOXIDEGOLD