Investigation of the formation of sputtered oxide clusters with the laser assisted sputtered neutral mass spectrometry technique (LASNMS)

Vlekken, J.J.VlekkenPolus, D.D.PolusD'Olieslaeger, MarcMarcD'OlieslaegerVandervorst, WilfriedWilfriedVandervorstDe Schepper, LucLucDe Schepper2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4764Investigation of the formation of sputtered oxide clusters with the laser assisted sputtered neutral mass spectrometry technique (LASNMS)Proceedings paper