Hardy, AnAnHardyVan Elshocht, SvenSvenVan ElshochtVan Bael, MarliesMarliesVan BaelD'Haen, JanJanD'HaenDouheret, OlivierOlivierDouheretDe Gendt, StefanStefanDe GendtAdelmann, ChristophChristophAdelmannCaymax, MattyMattyCaymaxConard, ThierryThierryConardWitters, ThomasThomasWittersD'Olieslaeger, MarcMarcD'OlieslaegerHeyns, MarcMarcHeynsMullens, JJMullens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12255Aqueous chemical solution deposition and characterization of ultrathin high-k dielectric metal oxide filmsProceedings paper