Direct measurement of barrier height at the HfO2/poly-Si interface:

Pantisano, LuigiLuigiPantisanoChen, Pei JunPei JunChenAfanas'ev, ValeriValeriAfanas'evRagnarsson, Lars-AkeLars-AkeRagnarssonPourtois, GeoffreyGeoffreyPourtoisGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152004-06https://imec-publications.be/handle/20.500.12860/9388Direct measurement of barrier height at the HfO2/poly-Si interface:Proceedings paper