Measurement of nonuniform stresses in semiconductor films by optical methods

Pinardi, KuntjoroKuntjoroPinardiJain, SureshSureshJainMaes, HermanHermanMaesVan Overstraeten, RogerRogerVan OverstraetenWillander, M.M.WillanderAtkinson, A.A.Atkinson2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2091Measurement of nonuniform stresses in semiconductor films by optical methodsOral presentation