Beaucarne, GuyGuyBeaucarneSaid, KhalidKhalidSaidVermeulen, TomTomVermeulenDuerinckx, FilipFilipDuerinckxPoortmans, JefJefPoortmansNijs, JohanJohanNijs2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1724Large-area remote plasma deposition of oxides and nitridesProceedings paper