Engineered combinations of inorganic ALD/CVD layers and monomolecular organic films

Armini, SilviaSilviaArmini2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24940Engineered combinations of inorganic ALD/CVD layers and monomolecular organic filmsMeeting abstracthttps://ecs.confex.com/ecs/228/webprogram/Paper59308.html