New insights in the impact of the breakdown mechanisms on the statistics of intrinsic and extrinsic breakdown in thin oxides

Groeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeveOgier, Jean-LucJean-LucOgierBellens, RudiRudiBellensRoussel, PhilippePhilippeRousselDepas, MichelMichelDepasMaes, HermanHermanMaes2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1241New insights in the impact of the breakdown mechanisms on the statistics of intrinsic and extrinsic breakdown in thin oxidesOral presentation