van der Veen, MarleenMarleenvan der VeenVereecke, BartBartVereeckeHuyghebaert, CedricCedricHuyghebaertCott, DaireDaireCottMasahito, SugiuraSugiuraMasahitoYusaku, KashiwagiKashiwagiYusakuTeugels, LieveLieveTeugelsCaluwaerts, RudyRudyCaluwaertsBeyer, GeraldGeraldBeyerHeyns, MarcMarcHeynsTokei, ZsoltZsoltTokeiDe Gendt, StefanStefanDe Gendt2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19966Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contactOral presentation