Stoffels, SteveSteveStoffelsGeens, KarenKarenGeensLi, XiangdongXiangdongLiWellekens, DirkDirkWellekensYou, ShuzhenShuzhenYouZhao, MingMingZhaoBorga, MatteoMatteoBorgaZanoni, EnricoEnricoZanoniMeneghesso, GaudenzioGaudenzioMeneghessoMeneghini, MatteoMatteoMeneghiniPosthuma, NielsNielsPosthumaVan Hove, MarleenMarleenVan HoveDecoutere, StefaanStefaanDecoutere2021-10-262021-10-2620182159-6859https://imec-publications.be/handle/20.500.12860/31861Evaluation of novel carrier substrates for high reliability and integrated GaN devices in a 200 mm complementary metal-oxide semiconductor compatible processJournal articlehttps://doi.org/10.1557/mrc.2018.192