Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns

Pathangi Sriraman, HariHariPathangi SriramanChan, BTBTChanVan Look, LieveLieveVan LookVandenbroeck, NadiaNadiaVandenbroeckVan Den Heuvel, DieterDieterVan Den HeuvelCross, AndrewAndrewCrossHong, Sung EunSung EunHongNafus, KathleenKathleenNafusD'Urzo, LuciaLuciaD'UrzoGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25742Capture probability of assembly defects in 14 nm half-pitch line/space DSA patternsMeeting abstract