Quasi-non volatile flatband-voltage shift in metal-oxide-semiconductor capacitors with silicon-rich-oxide dielectric

Rosmeulen, MaartenMaartenRosmeulenSleeckx, ErikErikSleeckxDe Meyer, KristinKristinDe Meyer2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5623Quasi-non volatile flatband-voltage shift in metal-oxide-semiconductor capacitors with silicon-rich-oxide dielectricProceedings paper