Ultra high voltage electron microscoy study of {113}-defect generation in Si nanowires

Vanhellemont, JanJanVanhellemontAnada, S.S.AnadaNagase, T.T.NagaseYasuda, H.H.YasudaBender, HugoHugoBenderRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandooren2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24738Ultra high voltage electron microscoy study of {113}-defect generation in Si nanowiresProceedings paperhttp://dx.doi.org/10.1557/opl.2014.895