Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths

Prager, LutzLutzPragerNaumov, SergeiSergeiNaumovPistol, L.L.PistolWennrich, L.L.WennrichBuchmeister, M. R.M. R.BuchmeisterMarsik, PremyslPremyslMarsikVerdonck, PatrickPatrickVerdonckBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14343Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengthsMeeting abstract