Eslava Fernandez, SalvadorSalvadorEslava FernandezIacopi, FrancescaFrancescaIacopiUrbanowicz, AdamAdamUrbanowiczKirschhock, Christine E. A.Christine E. A.KirschhockMaex, KarenKarenMaexMartens, Johan A.Johan A.MartensBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-1720080013-4651https://imec-publications.be/handle/20.500.12860/13705Ultraviolet-assisted curing of organosilicate glass low-k dielectric by excimer lampsJournal article