Choudhury, F.A.F.A.ChoudhuryNguyen, H.M.H.M.NguyenBaklanov, M.R.M.R.Baklanovde Marneffe, Jean-FrancoisJean-Francoisde MarneffeLi, W.W.LiPei, D.D.PeiBenjamin, D.I.D.I.BenjaminZheng, H.H.ZhengKing, S.W.S.W.KingLin, Y.H.Y.H.LinFung, H.S.H.S.FungChen, C.C.C.C.ChenNishi, Y.Y.NishiShohet, J.L.J.L.Shohet2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/26449Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiationJournal articlehttp://scitation.aip.org/content/aip/journal/apl/109/12/10.1063/1.4962899